Microdeflectometry – a novel tool to acquire 3D microtopology with nanometer height resolution

We introduce ”microdeflectometry”, a novel technique for measuring the microtopology of specular surfaces. The primary data is the local slope of the surface under test. Measuring the slope instead of the height implies high information efficiency and extreme sensitivity to local shape irregularities. The lateral resolution can be better than one micron whereas the resulting height resolution is in the range of one nanometer. Microdeflectometry can be supplemented by methods to expand the depth of field, with the potential to provide quantitative 3D imaging with SEM-like features.